450mm Session

Progress in 450 mm

Date: 10-11 October, 2012

Time: 14:00-17:30 / 08:30-12:30

Location: Messe Dresden

The progress in 450 mm during the last years was high based on worldwide activities. This workshop will cover the latest state of introduction planning and the R&D status for 450 mm including the European EEMI450 Initiative, ISMI and G450C, European projects on 450mm, the materials status and forecast, the metrology related to 450mm, the equipment development status and the technology as well as the device issues. In addition, the question for synergies and benefits for smaller diameters will be raised.

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